Mini-Environments
About
Airtek's tool integrated Mini-Environments are engineered to provide precise contamination and environmental control for semiconductor manufacturers operating at cleanliness ISO class 1 - 3.
Benefits
- Less than 1 PWP throughput
- Reduction in contamination related defects
- Reduces Cleanroom operating costs
- Improves operator safety
- Minimizes footprint
Optional Features
- Ultra Clean Static Charge Control
- Self Balancing Differential Pressure Control
- Automated Exhaust
- Temperature and Humidity Control
- Chemical Filtration
- In-Situ Monitoring